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1

Atomic layer germanium etching for 3D Fin-FET using chlorine neutral beam

Ohori, Daisuke, Fujii, Takuya, Noda, Shuichi, Mizubayashi, Wataru, Endo, Kazuhiko, Lee, En-Tzu, Li, Yiming, Lee, Yao-Jen, Ozaki, Takuya, Samukawa, Seiji

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2019

Language:

english

File:

PDF, 1.12 MB

english, 2019

2

Organic Contamination of Silicon Wafer in Clean Room Air and its Impact to Gate Oxide Integrity

Imafuku, D., Mizubayashi, W., Miyazaki, S., Hirose, M., Wakayama, Y., Kobayashi, S.

Journal:

MRS Proceedings

Year:

1997

Language:

english

File:

PDF, 774 KB

english, 1997

3

Carrier separation analysis for clarifying carrier conduction and degradation mechanisms in high-k stack gate dielectrics

Wataru Mizubayashi, Naoki Yasuda, Kenji Okada, Hiroyuki Ota, Hirokazu Hisamatsu, Kunihiko Iwamoto, Koji Tominaga, Katsuhiko Yamamoto, Tsuyoshi Horikawa, Toshihide Nabatame, Hideki Satake, Akira Torium

Journal:

Microelectronics Reliability

Year:

2005

Language:

english

File:

PDF, 300 KB

english, 2005

4

Young’s modulus of silver films

H. Mizubayashi, J. Matsuno, H. Tanimoto

Journal:

Scripta Materialia

Year:

1999

Language:

english

File:

PDF, 127 KB

english, 1999

5

Elastic behavior of linear chain conductor (TaSe4)2I

A. Suzuki, H. Mizubayashi, S. Okuda, M. Doyama

Journal:

Year:

1986

Language:

english

File:

PDF, 184 KB

english, 1986

6

Atom-like behaviors and orbital-related Tomonaga–Luttinger liquids in carbon nano-peapod quantum dots

J. Mizubayashi, J. Haruyama, I. Takesue, T. Okazaki, H. Shinohara, Y. Harada, Y. Awano

Journal:

Microelectronics Journal

Year:

2008

Language:

english

File:

PDF, 318 KB

english, 2008

7

The Elasticity Measurements of Aluminium nm-Films

H. Mizubayashi, Y. Yoshihara, S. Okuda

Journal:

physica status solidi (a)

Year:

1992

Language:

english

File:

PDF, 400 KB

english, 1992

8

Effects of in-situ pulse irradiation of 20 MeV protons and thermal pulses on the fatigue properties of low-carbon 316 stainless steel

H. Mizubayashi, C. Yan, H. Kikuchi, S. Okuda, Y. Tagishi

Journal:

Journal of Nuclear Materials

Year:

1991

Language:

english

File:

PDF, 346 KB

english, 1991

9

Experimental evidence for the flatband voltage shift of high-k metal-oxide-semiconductor devices due to the dipole formation at the high-kâSiO[sub 2] interface

Iwamoto, Kunihiko, Kamimuta, Yuuichi, Ogawa, Arito, Watanabe, Yukimune, Migita, Shinji, Mizubayashi, Wataru, Morita, Yukinori, Takahashi, Masashi, Ota, Hiroyuki, Nabatame, Toshihide, Toriumi, Akira

Journal:

Applied Physics Letters

Year:

2008

Language:

english

File:

PDF, 329 KB

english, 2008

10

Two-step annealing effects on ultrathin EOT higher-k (k=40) ALD-HfO2 gate stacks

Morita, Yukinori, Migita, Shinji, Mizubayashi, Wataru, Masahara, Meishoku, Ota, Hiroyuki

Journal:

Solid-State Electronics

Year:

2013

Language:

english

File:

PDF, 974 KB

english, 2013

11

Performance evaluation of parallel electric field tunnel field-effect transistor by a distributed-element circuit model

Morita, Yukinori, Mori, Takahiro, Migita, Shinji, Mizubayashi, Wataru, Tanabe, Akihito, Fukuda, Koichi, Matsukawa, Takashi, Endo, Kazuhiko, O’uchi, Shin-ichi, Liu, Yongxun, Masahara, Meishoku, Ota, Hi

Journal:

Solid-State Electronics

Year:

2014

Language:

english

File:

PDF, 886 KB

english, 2014

12

[IEEE 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - Hsinchu, Taiwan (2014.4.28-2014.4.30)] Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - Fluctuation in drain induced barrier lowering (DIBL) for FinFETs caused by granular work function variation of metal gates

Matsukawa, T., Fukuda, K., Liu, Y.X., Endo, K., Tsukada, J., Ishikawa, Y., Yamauchi, H., O'uchi, S., Migita, S., Mizubayashi, W., Morita, Y., Ota, H., Masahara, M.

Year:

2014

Language:

english

File:

PDF, 1.35 MB

english, 2014

13

[IEEE 2007 IEEE International Electron Devices Meeting - Washington, DC, USA (2007.12.10-2007.12.12)] 2007 IEEE International Electron Devices Meeting - Comprehensive Study of VFB Shift in High-k CMOS - Dipole Formation, Fermi-level Pinning and Oxygen Vacancy Effect

Kamimuta, Y., Iwamoto, K., Nunoshige, Y., Hirano, A., Mizubayashi, W., Watanabe, Y., Migita, S., Ogawa, A., Ota, H., Nabatame, T., Toriumi, A.

Year:

2007

Language:

english

File:

PDF, 3.48 MB

english, 2007

14

[IEEE 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings - San Francisco, CA, USA (6-8 Oct. 1997)] 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) - Reliability evaluation of ultrathin gate oxides grown on Si wafers stored in clean stocker with a UV/photoelectron source

Tobimatsu, H., Mizubayashi, W., Fujii, T., Shibahara, K., Yokoyama, S., Hirose, M.

Year:

1997

Language:

english

File:

PDF, 419 KB

english, 1997

15

Anelastic properties of single-phase

Mizubayashi, H., Takita, K., Okuda, S.

Journal:

Physical Review B

Year:

1988

Language:

english

File:

PDF, 200 KB

english, 1988

16

Anelasticity study of self-interstitials in tungsten

Okuda, S., Mizubayashi, H.

Journal:

Physical Review B

Year:

1976

Language:

english

File:

PDF, 571 KB

english, 1976

17

Highly Vt tunable and low variability triangular fin-channel MOSFETs on SOTB

Liu, Y.X., Matsukawa, T., Endo, K., O’uchi, S., Tsukada, J., Yamauchi, H., Ishikawa, Y., Mizubayashi, W., Morita, Y., Migita, S., Ota, H., Masahara, M.

Journal:

Microelectronic Engineering

Year:

2015

Language:

english

File:

PDF, 1.44 MB

english, 2015

18

Recovery of Irradiation Induced Defects at Low Temperatures in Nb and Ta Studied by Internal Friction

Arai, Takayuki, Mizubayashi, H., Okuda, Seiichiro, Okumura, M., Seki, S.

Journal:

Materials Science Forum

Year:

1987

File:

PDF, 352 KB

1987

19

Tunnel Field-Effect Transistors with Extremely Low Off-Current Using Shadowing Effect in Drain Implantation

Mori, Takahiro, Yasuda, Tetsuji, Maeda, Tatsuro, Mizubayashi, Wataru, O'uchi, Shin-ichi, Liu, Yongxun, Sakamoto, Kunihiro, Masahara, Meishoku, Ota, Hiroyuki

Journal:

Japanese Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 1.75 MB

english, 2011

20

[IEEE Extended Abstracts of International Workshop on Gate Insulator - Toyko, Japan (2003.11.6-2003.11.7)] Extended Abstracts of International Workshop on Gate Insulator (IEEE Cat. No.03EX765) - Comparative study of carrier mobility and threshold voltage between N- and p-MOSFETs in TaN gate CMOS with EOT = 1.5-2 nm HfAlOx

Ota, H., Hisamatsu, H., Yasuda, N., Mizubayashi, W., Ohno, M., Iwamoto, K., Tominaga, K., Kadoshima, M., Yamagishi, N., Akiyama, K., Yamamoto, K., Nabatame, T., Horikawa, T., Toriumi, A.

Year:

2003

Language:

english

File:

PDF, 333 KB

english, 2003

21

Impact of fin length on threshold voltage modulation by back bias for Independent double-gate tunnel fin field-effect transistors

Mizubayashi, W., Fukuda, K., Mori, T., Endo, K., Liu, Y.X., Matsukawa, T., O’uchi, S., Ishikawa, Y., Migita, S., Morita, Y., Tanabe, A., Tsukada, J., Yamauchi, H., Masahara, M., Ota, H.

Journal:

Solid-State Electronics

Year:

2015

Language:

english

File:

PDF, 853 KB

english, 2015

22

Improvement of epitaxial channel quality on heavily arsenic- and boron-doped Si surfaces and impact on performance of tunnel field-effect transistors

Morita, Yukinori, Mori, Takahiro, Migita, Shinji, Mizubayashi, Wataru, Fukuda, Koichi, Matsukawa, Takashi, Endo, Kazuhiko, O’uchi, Shin-ichi, Liu, Yongxun, Masahara, Meishoku, Ota, Hiroyuki

Journal:

Solid-State Electronics

Year:

2015

Language:

english

File:

PDF, 1.88 MB

english, 2015

23

Analysis of Threshold Voltage Flexibility in Ultrathin-BOX SOI FinFETs

Endo, Kazuhiko, Migita, Shinji, Ishikawa, Yuki, Matsukawa, Takashi, O'uchi, Shin-ichi, Tsukada, Junji, Mizubayashi, Wataru, Morita, Yukinori, Ota, Hiroyuki, Yamauchi, Hitomi, Masahara, Meishoku

Journal:

Journal of Low Power Electronics and Applications

Year:

2014

Language:

english

File:

PDF, 859 KB

english, 2014

24

Ultrathin gate dielectrics for silicon nanodevices

M Hirose, W Mizubayashi, Khairurrijal, M Ikeda, H Murakami, A Kohno, K Shibahara, S Miyazaki

Journal:

Superlattices and Microstructures

Year:

2000

Language:

english

File:

PDF, 480 KB

english, 2000

25

O-D peak in Nb studied by anelastic methods

S. Okuda, H. Mizubayashi, N. Matsumoto, N. Kuramochi, C. Mochizuki, R. Hanada

Journal:

Acta Metallurgica

Year:

1984

Language:

english

File:

PDF, 378 KB

english, 1984

26

Elastic anomalies in 1T-TaS2

A. Suzuki, R. Yamamoto, M. Doyama, H. Mizubayashi, S. Okuda, K. Endo, S. Gonda

Journal:

Solid State Communications

Year:

1984

Language:

english

File:

PDF, 281 KB

english, 1984

27

Metal carbide-induced negative flatband voltage shift in TaCx and HfCx/HfO2 gate stacks

Wataru Mizubayashi, Koji Akiyama, Wenwu Wang, Minoru Ikeda, Kunihiko Iwamoto, Yuuichi Kamimuta, Akito Hirano, Hiroyuki Ota, Toshihide Nabatame, Akira Toriumi

Journal:

Applied Surface Science

Year:

2008

Language:

english

File:

PDF, 651 KB

english, 2008

28

Underlying mechanisms for unique elastic properties of nanocrystalline Au

H. Tanimoto, S. Sakai, K. Otuka, E. Kita, H. Mizubayashi

Journal:

Materials Science and Engineering: A

Year:

2004

Language:

english

File:

PDF, 104 KB

english, 2004

29

Elasticity study on collective motion in metallic glasses

T. Takahashi, H. Tanimoto, H. Mizubayashi

Journal:

Materials Science and Engineering: A

Year:

2006

Language:

english

File:

PDF, 585 KB

english, 2006

30

Elasticity study of very thin Cu films

K. Fujiwara, H. Tanimoto, H. Mizubayashi

Journal:

Materials Science and Engineering: A

Year:

2006

Language:

english

File:

PDF, 646 KB

english, 2006

31

Elasticity study of the irradiation-induced polymerization and decomposition of C60 solid

H. Tanimoto, K. Yamada, H. Mizubayashi, S. Sakai, K. Narumi, H. Naramoto

Journal:

Materials Science and Engineering: A

Year:

2006

Language:

english

File:

PDF, 549 KB

english, 2006

32

Anelasticity study on electromigration effect in Cu thin films

H. Mizubayashi, K. Goto, T. Ebisawa, H. Tanimoto

Journal:

Materials Science and Engineering: A

Year:

2006

Language:

english

File:

PDF, 523 KB

english, 2006

33

Anelasticity study on interfaces of nanocrystalline Au and nanoporous Au

H. Tanimoto, K. Mutou, Y. Hosonuma, K. Yamamoto, H. Mizubayashi

Journal:

Materials Science and Engineering: A

Year:

2009

Language:

english

File:

PDF, 360 KB

english, 2009

34

The hydrogen-induced structural relaxation and crystallization observed in amorphous Cu50Zr50 and Cu60Zr40

H Mizubayashi, M Matsumoto, H Itoh, S Okuda

Journal:

Materials Science and Engineering: A

Year:

1994

Language:

english

File:

PDF, 390 KB

english, 1994

35

The inelastic property of amorphous Cu50Zr50

H Mizubayashi, M Kaida, S Otsuka, S Okuda

Journal:

Materials Science and Engineering: A

Year:

1994

Language:

english

File:

PDF, 361 KB

english, 1994

36

Effects of passing electric current on the elastic property of amorphous Cu50Zr50 and Cu50Ti50

R. Takemoto, M. Nagata, H. Mizubayashi

Journal:

Acta Materialia

Year:

1996

Language:

english

File:

PDF, 1001 KB

english, 1996

37

Anelasticity of nanocrystalline metals

H Tanimoto, S Sakai, H Mizubayashi

Journal:

Materials Science and Engineering: A

Year:

2004

Language:

english

File:

PDF, 374 KB

english, 2004

38

Feasibility study of hydrogenated amorphous alloys as high-damping materials

H. Mizubayashi, Y. Ishikawa, H. Tanimoto

Journal:

Materials Science and Engineering: A

Year:

2004

Language:

english

File:

PDF, 152 KB

english, 2004

39

Hydrogen-induced structural relaxation in bulk metallic glasses

K. Yamagishi, H. Tanimoto, H. Mizubayashi

Journal:

Materials Science and Engineering: A

Year:

2006

Language:

english

File:

PDF, 549 KB

english, 2006

40

Light-induced anelastic change in a-Si(H)

T. Hinuma, H. Kasai, H. Tanimoto, M. Yamanaka, I. Sakata, H. Mizubayashi

Journal:

Materials Science and Engineering: A

Year:

2006

Language:

english

File:

PDF, 584 KB

english, 2006

41

Deformation by grain rotations in nanocrystalline fcc-metals

N. Yagi, A. Rikukawa, H. Mizubayashi, H. Tanimoto

Journal:

Materials Science and Engineering: A

Year:

2006

Language:

english

File:

PDF, 433 KB

english, 2006

42

Preface

H. Mizubayashi, Y. Nishino, H. Numakura

Journal:

Materials Science and Engineering: A

Year:

2006

Language:

english

File:

PDF, 53 KB

english, 2006

43

Anomalous large internal friction observed for nm-thick Ag film below room temperature

H. Tanimoto, A. Fujiwara, K. Yamaura, H. Mizubayashi

Journal:

Materials Science and Engineering: A

Year:

2009

Language:

english

File:

PDF, 610 KB

english, 2009

44

Anomalous properties found in Cu films near below 100 nm thick deposited on Ta

Hisanori Tanimoto, Kenji Fujiwara, Hiroshi Mizubayashi

Journal:

Science and Technology of Advanced Materials

Year:

2005

Language:

english

File:

PDF, 482 KB

english, 2005

45

AFM measurement of atomic-scale Si surface etching by active oxidation

Y. Morita, S. Migita, W. Mizubayashi, H. Ota

Journal:

Surface Science

Year:

2010

Language:

english

File:

PDF, 1002 KB

english, 2010

46

AFM observation of nanocrystalline Au prepared by a gas deposition method

H. Tanimoto, H. Fujita, H. Mizubayashi, Y. Sasaki, E. Kita, S. Okuda

Journal:

Materials Science and Engineering: A

Year:

1996

Language:

english

File:

PDF, 537 KB

english, 1996

47

Collective motion of many atoms in amorphous alloys induced under passing electric current

H. Mizubayashi, R. Takemoto, Y. Seki

Journal:

Materials Science and Engineering: A

Year:

1996

Language:

english

File:

PDF, 399 KB

english, 1996

48

Dynamic anelastic response of amorphous alloys suggesting collective motions of many atoms

H. Mizubayashi, T. Okamoto, K. Koyama, M. Horiuchi

Journal:

Acta Materialia

Year:

1998

Language:

english

File:

PDF, 910 KB

english, 1998

49

Local strain around hydrogen in amorphous Cu50Zr50 and Cu50Ti50

H. Mizubayashi, M. Shibasaki, S. Murayama

Journal:

Acta Materialia

Year:

1999

Language:

english

File:

PDF, 223 KB

english, 1999

50

Dislocation pinning in Mo and Cu after neutron irradiation at low temperature

S. Okuda, H. Mizubayashi

Journal:

physica status solidi (a)

Year:

1973

Language:

english

File:

PDF, 620 KB

english, 1973

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